Application reports

A new version of the AMC analyser has been developed.

(AMC=Airborn Molecular Contamination in FOUP)

Alcatel-Lucent Japan, representing Alcatel Vacuum Technology France, has released its AMC (Airborne Molecular Contamination) analyzer inside a wafer carrier (APA, Adixen POD Analyser). It is the first in the world to conduct AMC analysis inside of FOUP. This new development, which has improved the detection sensibility of the gas analyser in the new APA version 2008, is now available on the domestic market.