Airborne Molecular contamination (AMC) control
adixen Pod Analyser In-line FOUP monitoring (APA 302)
The APA 302 (adixen Pod Analyzer) is a unique in-line FOUP AMC monitoring solution to:
- Detect in 2 mn and characterize at FOUP and wafer level
- Improve understanding of the wafer environment
- Provide real time data to optimize cleaning techniques
BENEFITS
- Real time monitoring
- High Sensitivity (sub ppbv detection)
- No FOUP modification Needed
- High Throughput
For more information, please contact Emmanuelle VERAN: emmanuelle.veran@adixen.fr
