Molecular decontamination solution
adixen Pod Regenerator (APR)
An ultimate solution against Airborne Molecular Contamination (AMC).
The APR 4300 design results in:
- Revolutionary process
- Flexible configuration
- World class particle performance
- SEMI S2 compliance
- 100 wafers / cycle
APPLICATIONS
- After FEOL Etch
- After BEOL Etch
- After implantation
