The APA 302 (Adixen Pod Analyzer) is a unique in-line FOUP AMC monitoring solution to:

• Detect in 2 mn and characterize at FOUP and wafer level
• Improve understanding of the wafer environment
• Provide real time data to optimize cleaning techniques

BENEFITS

• Real time monitoring
• High Sensitivity (sub ppbv detection)
• No FOUP modification Needed
• High Throughput
  
  
  For more information, please contact Emmanuelle VERAN: emmanuelle.veran@adixen.fr