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Small size maglev hybrid turbomolecular pump
ATH 500 M
adixen Vacuum Product presents a small maglev hybrid turbomolecular pump with compact integrated controller for easy installation to wide range applications.
ATH 500 M offers advanced technology of magnetic bearings for medium sized applications. This compact design with integrated control electronics brings the high reliability of 5-axis, mag-lev rotor
suspension to the 300 - 500 liter/sec application range on flanges DN160 and DN100.
The ATH 500 M is compact enough to easily replace most conventional ball bearing turbopumps of similar pumping speed in embedded applications.
Customer benefits and key features:
• Compactness: Pump height 255 mm, Pump diameter 180 mm,.
• Easy installation in any position, with a single 48 VDC power feed, no cables.
• Heated version available for harsh processes.
• Proven robust technology offering high reliability
• Compound rotor design that provides high pumping speed with minimum footprint
• Adjustable rotational speed for optimized pumping parameters
• 5 axis maglev rotor suspension system offering :
- No contamination
- Low level of Noise and Vibration
- Installation in any orientation
• High foreline tolerance up to 1.5 Torr
• DN100 or DN160 inlet flange connection
• CE marked and Rohs compliant
