Large size maglev hybrid turbomolecular pump

ATH 2800 / 3200 M has been introduced for silicon based industry applications, based on adixen's large experience from ATH 2300 M.

ATH 2800 M offers a maximum pumping speed for DN 250 flange.
ATH 3200 M with DN320 flange is designed for applications that require high pumping speed combined with high gas throughput up to 5000 sccm of N2.

Customer benefits and key features
• Highest pumping speed for DN250 (ATH2800M)
• Heated version for SC harsh processes.
• High throughput at process pressure
• Proven robust technology offering high MTBF in all applications.
• Compound rotor design for high pumping speed and high fore line tolerance.
• Active 5 axis magnetic bearing system offering zero contamination and low level of noise and vibration
• Special design reducing maximum transmitted torque
• Compact pump design
• Adjustable rotational speed for optimized pumping parameters
• Integrated purge gas system and temperature management ensuring upmost resistance to process deposition