Integrated Light Process Dry Pumps

Since 1999, date of A100L introduction, the dry pump integration concept has become a standard in the Semiconductor industry. A100L is today installed in every 300mm Semiconductor plant in the world, providing recognized benefits to the key players of the industry.

• Direct integration on to wafer processing equipment:
ELIMINATION OF FORELINE & significant reduction of facilities and hook-up costs

• 100 m3/h pumping speed at point of use:
Can replace UP TO 500 M3/H remote pumps INCREASING THROUGHPUT

• Quiet and clean:
Designed for CLEAN ROOM operation

• Energy efficient:
Reduces FAB ENERGY CONSUMPTION

• Reliable:
adixen FIELD PROVEN multi-stage roots technology

The largest installed base world wide

Applications:

• Load-locks

• Transfer chambers

• PVD

• SEM

• Preclean chambers

• Anneal chambers