Data storage :
Manufacturing of CDs or DVDs requires coating with various materials, one by one, at a speed up to 1 disk per second.
This high throughput can only be achieved utilizing robust pumping solutions for the load/lock and sputtering chambers.
Pumping solutions
The adixen ATP Series turbopumps backed by the adixen PASCAL Series rotary vane pumps have demonstrated high reliability in this demanding, high production environment. Hundreds of ATP150 and 2021 primary pumps are installed all around the world.
Leak detection
The ASM 182-192 series and ASM 142 Series helium leak detectors are ideal for this application.
Vacuum Gauges AP2004 and ACC2009 ensure accurate and robust pressure management of load-lock and process chamber.
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