Tool and/or decorative Coating :
Tool coating is used to improve hardness and wear resistance of tools. Tool and decorative coatings are applied in a high production environment requiring a reliable and robust vacuum solution.
Pumping solutions
The adixen Magnetically levitated turbomolecular pumps (ATH-M Series) have demonstrated complete compatibility with these application requirements.
Additionally, large PASCAL Series rotary vane pumps with Roots can be used.
Leak detection
ASM 142 Series helium leak detectors are ideal solutions.
Pressure measurement and control: ACC2009 vacuum gauges provide accurate and robust pressure management of process chamber.
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