Medium process :
Medium applications include all applications using corrosive & aggressive chemistries, which after reaction in the process chamber may combine in condensable by-products or generate powder.
The dry pump ranges below include all the features to warranty the highest pump life time. The ADKP Series is based on field proven Serie 2 ADS1202H, with a robust top roots blower to increase the pumping speed up to 7,000 m3/h. The ADKP range offers :
• High pumping speeds
• Wide process range capabilities including NF3 cleans
• Low footprint (<1 m²)
• Low noise level
• Easy maintenance with separate wheel mounted frames
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