Harsh process :
Harsh applications include PECVD processes generating large quantities of powder and using NF3 cleans. ADKH pumps are the right choice for such applications. Using a new high capacity dry pump and an optimized combination of roots blowers, peak pumping speeds up to >5,000 m3/h are available, with high maximum continuous flows. The ADKH range offers:
• High pumping speeds
• Highest protection against powder and highly corrosive gases
• Low utilities consumption
• Easy maintenance with separate wheel mounted frames.
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