APMS :
adixen Vacuum Products Predictive Maintenance System
Thanks to an effective central monitoring system, adixen Vacuum Products has collected extensive pump data from worldwide installed bases over several years. From this data, and understanding our customers' needs, we have developed a software, based on adixen propriety algorithms, for real time predictive maintenance.
This introductory package is dedicated to predicting future failure of pump due to silencer, exhaust line or scrubber clogging. The production team is informed in advanced of failure, allowing to stop the process at a suitable time to take corrective action and prevent expensive wafer loss.
Real time pump predictive maintenance:
• avoid pump failure during wafer processing.
• increase up-time through full control of pump maintenance.
• reduce field manpower as the software performs automated pump supervision.
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