Based on mastered multi-stage roots technology, Alcatel Vacuum Technology provides a wide range of high capacity dry pumps covering all requirements of up to G10 FPD fabs, as well as Silicon or Thin Film based technologies for photovoltaic cells manufacturing. Light process :
Key requirements for such applications are fast pump down, limited noise level and robustness.
The ADKL range offers :
• high performance (30 sec from atmosphere to 10-1 mbar on a 1000 liters volume for AD70KL, ultimate pressure lower than 10-3 mbar),
• low energy consumption thanks to a unique automatic boost / stand-by mode
• low utilities consumption (no nitrogen purge necessary) provides high energy saving,
• low footprint (< 1 m²)
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