Based on mastered multi-stage roots technology, Alcatel Vacuum Technology provides a wide range of high capacity dry pumps covering all requirements of up to G10 FPD fabs, as well as Silicon or Thin Film based technologies for photovoltaic cells manufacturing. Harsh process :
Harsh applications include PECVD processes generating large quantities of powder and using NF3 cleans. ADKH pumps are the right choice for such applications. Using a new high capacity dry pump and an optimized combination of roots blowers, peak pumping speeds up to >5,000 m3/h are available, with high maximum continuous flows. The ADKH range offers:
• High pumping speeds
• Highest protection against powder and highly corrosive gases
• Low utilities consumption
• Easy maintenance with separate wheel mounted frames.
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