News

Successful collaboration of AMAT ADIXEN and DMS on AMC prevention

Common presentation at 21st Annual IEEE/SEMI Advanced Semiconductor Manufacturing Conference (ASMC 2010)

Successful collaboration of AMAT ADIXEN and DMS on AMC prevention

We have identified an issue where VOCs (volatile organic compounds) being absorbed in a FOSB were generating spherical shaped organic particles on the wafers during the wafer transportation. Upon completion of several experiments, a treatment using Adixen vacuum system to out-gas the VOC contaminants from the FOSB was found to be effective to suppress this organic particle generation during the wafer transportation.

Documentation :

Download now see the presentation Download

Top of the page
 

Contact us About us News Events Site map Newsletter  


Other Websites :

Adixen China | Adixen Germany | Adixen France | Adixen India | Adixen Italy | Adixen Japan | Adixen Korea
Adixen Netherlands | Adixen Sweden | Adixen Taiwan | Adixen UK | Adixen USA | Adixen Singapore
Copyright © 2010 Alcatel Vacuum Technology. All right reserved Legal Notices