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ATPS 2

ATPS 2 - New plug-and-play tool pumping and abatement system from adixen Vacuum Products

adixen Vacuum Products of France has launched a new optimized dry pump and abatement installation approach dramatically increasing available space in crowded fab basements by reducing the footprint for one tool by 30 - 70 percent.
The adixen Tool Pumping Solution (ATPS) provides hook-up and start-up time reduction, fully independent pumping lines, lower noise level, abatement modules integration, increased safety and easy maintenance.

If you need more information you can contact Bertrand Seigeot
email : bertrand.seigeot@adixen.fr