Press release
Press Releases and Technical Articles list
Modelisation:
- R. Bernard, A. Favre, H. Kambara, Agnès Roche, “Using numerical simulation to optimize 300mm FOUP purging” Solid state technology October 2003 issue, p.71 (2003)
- R. Bernard, A. Favre, H. Kambara, “Preventing wafer contamination” Fluent news letter spring 2004 issue, p22 (2004) Article available in Press Release section / Advanced Systems in english and japanese version
- R. Bernard, A. Favre, H. Kambara, “Preventing wafer contamination” Cleanroom Technology June 2004 issue, p27 (2004)
- A. Favre, H. Kambara, “Physical comprehension of the wafers isolation pod (FOUP 300 mm) purge phenomena by a numerical simulation tool”, SEMICON Japan 2004 SEMI Technology Symposium, p6-62 (2004)
- A. Favre, H. Kambara, “Contamination comprehension in a clean room and its reduction method optimization by fluid dynamic simulation”, SEMICON Korea 2005 - H. Kambara, “Advanced Solutions for Micro and Nano technologie”, Nanoforum symposium, Milan/ Italy, Sept 2005
APA : adixen Pod Analyser:
- H. Kambara, “Airborne Molecular Contamination Monitoring in the substrate carrier for 300mm fab by Ion Mobility Spectrometry with adixen Pod Control Station”, AEC/APC Symposium Asia – Taiwan, December 2006
- Philippe Maquin , Arnaud Favre , Xavier Metais Airborne Molecular Contamination Monitoring of 300mm Front Opening Unified Pod (FOUP) by Ion Mobility Spectrometry 3rd ISMI Symposium on Manufacturing Effectiveness October 9-11, 2006 Austin Texas
APR : adixen Pod Regenerator:
- H. Kambara, E. Godot, E. Veran, B. Pelissier, V. Loup, D. Bensahel, O. Joubert; “Controlling Germanium Oxidation With a Vacuum Substrate Carrier”, Semiconductor International, March 2007. Article available in Press Release section / Advanced Systems
Vacuum Transport:
- Philippe Maquin “ EUV Mask Carrier & Load Port Standards Session “ SEMICON West Marriot Hotel , San francisco 2006
For more information regarding these press releases and technical articles please contact your nearest subsidiaries, or:
- Emmanuelle Veran (Business development), email : emmanuelle.veran@adixen.fr
