Process dry pumps

Process Dry Pumps

Multi-process dry vacuum pumps From 95 to 1800 m3/h - Load-lock & process applications ADP/ADS Series Two

Low power consumption process pumps From 120 to 1000 m3/h - Low energy dry pumps for medium applications (Etching, implant,...) A3P Range

Large dry pumps for harsh processes Dry pumps up to >5000 m3/h for powder generating processes and/or corrosive. AD3KH range