High vacuum pumps
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Maglev turbopumps
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New hybrid maglev turbomolecular pump- 500 l/s - With integrated controller ATH 500 M |
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Maglev hybrid turbomolecular pumps- 500l/s to 3200 l/s - Industrial applications ATH-M Series |
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New Maglev hybrid turbomolecular pump- specifically designed for Photovoltaic applications ATH 3200 M |
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Maglev hybrid turbomolecular pumps2300 l/s - pure turbomolecular pump for light gas pumping ATP 2300M |
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